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Deep UV Photolithography - Newport
Web2 dec. 2024 · Generally speaking, FPD lithography equipment is composed of a light source, a photomask stage, an optical system containing lenses and/or mirrors and a plate stage. Photolithography methods can generally be divided into two types: mirror-projection lithography that uses a large mirror to perform exposure and refractive optical systems … Webinterference lithography as plas ma sources lack the neces-sary coherence for these applications [4,5]. Source Requirements Industry consensus requirements jointly … simulated algorithm
Lithography optics - How it all began ZEISS
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